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Air Products and Chemicals Inc.
Air Products and Chemicals Inc.
06/14/2012 | Press release
14 June 2012 Air Products Highlights Deposition Expertise at ALD 2012 View News Release ?
distributed by noodls on 06/14/2012 12:57
Air Products (NYSE:
APD) will highlight its expertise in chemistry and
thin film depositionat the upcoming AVS Atomic
Layer Deposition (ALD) Conference 2012 to be held at the
Westin Bellevue in Dresden, Germany from June 17-20.
The ALD conference has grown in importance over the last
several years because atomic layer deposition is capable of
addressing the fabrication requirements for advanced
semiconductor devices. Manufacturing complex structures, such
as high aspect ratio capacitors for DRAM and FinFET/Tri-Gate
Transistors for high performance logic devices, are seen as
essential for advancing high-performance, mobile- and
cloud-based computing applications. ALD is the enabling
technology to address these challenges.
Researchers from Air Products will present a number of papers
at the show both jointly with R&D partners and in work
authored solely by the company. This will include an oral
presentation on Atomic Layer Deposition of GST Layers for
Phase Change Memories, based on joint work with Seoul
National University and presented by Professor C.S. Hwang,
and another on Atomic Layer Deposition of Strontium Oxide and
Titanate Using Novel Imidazolate Precursors, to be given by
Dr. Sergei Ivanov. Collaborative work with external partners
will also be highlighted in poster presentations including
Investigation of the Growth Properties of Titanium Oxide ALD
Depositions (jointly with Fraunhofer Center for
Nanoelectronic Technologies) and Pushing the Limits of ALD in
Process Speed (jointly with Beneq). Poster presentations will
also be made on Aminosilanes for Atomic Layer Deposition of
Silicon Oxide and Group 2 Imidazolate Solutions for Direct
Liquid Injection.
"Over the last three years, Air Products has accelerated
its investments for developing chemical precursors, for
molecular modeling to fundamentally understand surface
interactions, and in ALD deposition tools, and our customers
are recognizing the value of partnering with us to address
their process needs," said Dr. Gene Karwacki, the
commercial manager for deposition and etching product
development for Air Products. "We now have teams of
chemists designing and preparing the precursors which we test
in multiple ALD tools in our applications labs in
Koreaand
California. Our efforts span
high-K dielectrics, Metals, Phase Change alloys
and silicon dielectrics."
Starting June 21, please visit www.airproducts.com/ALDto
view the posters presented at this year's conference.
Narrated presentations given by representatives from Air
Products will be available July 2.
Air Products (NYSE:APD) provides atmospheric, process and
specialty gases; performance materials; equipment; and
technology. For over 70 years, the company has enabled
customers to become more productive, energy efficient and
sustainable. More than 18,000 employees in over 40 countries
supply innovative solutions to the energy, environment and
emerging markets. These include semiconductor materials,
refinery hydrogen, coal gasification, natural gas
liquefaction, and advanced coatings and adhesives. In fiscal
2011, Air Products had sales of approximately $10 billion.
For more information, visit www.airproducts.com
.
NOTE: This release may contain forward-looking statements
within the safe harbor provisions of the Private Securities
Litigation Reform Act of 1995. These forward-looking
statements are based on management's reasonable
expectations and assumptions as of the date of this release
regarding important risk factors. Actual performance and
financial results may differ materially from projections and
estimates expressed in the forward-looking statements because
of many factors not anticipated by management, including risk
factors described in the Company's Form 10K for its
fiscal year ended September 30, 2011.
